Process
Table of Contents

Processes

InP Ingot and Wafer

Processing links and resources

KLayout

KLayout tutorial from UWaterloo
(YouTube video)

Wet bench

SOP for Peroxide forming chemicals

HPIM1357

Plasma processes

Glass Wet Etch

Cleaning and wet etching

Karl Suss

Photolithography

HPIM13601

Thin film deposition

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