Plasma processes

Table of Contents
  1. Oxford COBRA: ICP etcher
  2. SAMCO RIE 10-NR: dry etching system
  3. TRION: PECVD & RIE
  4. PLASMAQUEST: ECR plasma etcher
  5. Plasma Etch PE-50 Plasma etcher/cleaner
  6. Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions

Oxford COBRA: ICP etcher

SAMCO RIE 10-NR: dry etching system

TRION: PECVD & RIE

PLASMAQUEST: ECR plasma etcher

Plasma Etch PE-50 Plasma etcher/cleaner

Handbook of Plasma Processing Technology – Fundamentals, Etching, Deposition, and Surface Interactions

(External link)

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