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Current issues:
January 23, 2026
- Nothing to report
Announcements:
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Next Orientation Lecture
: Monday, February 9, at 10:00 in room 488 - Contact
qmi-anf@lists.ubc.ca
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Etching
Oxford COBRA: ICP etcher
TRION: PECVD & RIE
PLASMAQUEST: ECR plasma etcher
SAMCO RIE 10-NR: dry etching system
Plasma Etch PE-50 Plasma etcher/cleaner
XACTIX: XeF2 etcher
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