Name: UBC Blusson QMI Advanced Nanofabrication Facility
Address: 2355 East Mall, Vancouver, BC, V6T 1Z4, CA
Telephone: +1-604-827-3228
Location: UBC Vancouver Campus

Neutronix-Quintel NxQ4006: 100mm mask aligner (currently single side)

Type: Optical Lithography

Status: Online

Current issues:

Announcements:

Current Cleanroom Conditions:

DEEDIRECTORS-2015: 8 source load-lock electron beam evaporator

Heidelberg MLA-150 Maskless Lithography System

TPT Wirebonder (wedge and ball wirebonding)

TRION: PECVD & RIE

PLASMAQUEST: ECR plasma etcher

DISCO DAD3240 Dicing Saw

SAMCO RIE 10-NR: dry etching system

Neutronix-Quintel NxQ4006: 100mm mask aligner (currently single side)

Plasma Etch PE-50 Plasma etcher/cleaner

FILMETRIX F40: Thin film thickness measurement system

POS Labcoter: Parylene Coater

Nikon microscopes with CCD camera

Equipment

Reserve Equipment

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