Name: UBC Blusson QMI Advanced Nanofabrication Facility
Address: 2355 East Mall, Vancouver, BC, V6T 1Z4, CA
Telephone: +1-604-827-3228
Location: UBC Vancouver Campus

DEEDIRECTORS-2015: 8 source load-lock electron beam evaporator

Type: Thin Film Deposition

Status: Online

Current issues:

Announcements:

Current Cleanroom Conditions:

Wetbench ISO-6 yellow room

Wetbench ISO-5 yellow room

Wetbench ISO-6 white room

ANNEALSYS AS-ONE: Rapid thermal processing (RTP) system

E-Beam Lithography System (JEOL JBX-8100FS)

AJA Hybrid Evaporator System

CNC Microdrill

Oxford COBRA: ICP etcher

Tresky Die Bonder (Pick n’ Place) Tool

KSL-1100X: Box furnace

DEEDIRECTORS-2015: 8 source load-lock electron beam evaporator

Heidelberg MLA-150 Maskless Lithography System

Equipment

Reserve Equipment

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