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Current issues:
January 23, 2026
- Nothing to report
Announcements:
New SLACK channel
#training requests
Next Orientation Lecture
: Monday, February 9, at 10:00 in room 488 - Contact
qmi-anf@lists.ubc.ca
to reserve a spot
Current Cleanroom Conditions:
Live conditions and updates
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Equipment
Oxford COBRA: ICP etcher
Type:
Etching
Status:
Online
TRION: PECVD & RIE
Type:
Etching
Thin Film Deposition
Status:
Online
PLASMAQUEST: ECR plasma etcher
Type:
Etching
Status:
Online
SAMCO RIE 10-NR: dry etching system
Type:
Etching
Status:
Online
Plasma Etch PE-50 Plasma etcher/cleaner
Type:
Etching
Status:
Online
XACTIX: XeF2 etcher
Type:
Etching
Status:
Online
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